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Proceedings 2017, 1(4), 277; doi:10.3390/proceedings1040277

Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode

1
School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Ramat Aviv 69978, Israel
2
Department of Civil Engineering, Faculty of Engineering, Ariel University, Ariel 44837, Israel
3
Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 16 August 2017
Download PDF [538 KB, uploaded 16 August 2017]

Abstract

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the mechanically-latched beam is achieved by pre-loading the structure using a rising voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt removal of the loading results in a transient response and dynamic snap-back of the beam.
Keywords: curved micro beam; electrostatic actuation; dynamic release; bistability; MEMS/NEMS curved micro beam; electrostatic actuation; dynamic release; bistability; MEMS/NEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Medina, L.; Gilat, R.; Ilic, B.; Krylov, S. Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode. Proceedings 2017, 1, 277.

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