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Technologies 2016, 4(1), 10; doi:10.3390/technologies4010010

Development of a CMOS Route for Electron Pumps to Be Used in Quantum Metrology

1
Laboratoire d’électronique des technologies de l’information (LETI), Université Grenoble Alpes and CEA, Minatec Campus, F-38054 Grenoble, France
2
Institut Nanosciences et Cryogénie (INAC), Université Grenoble Alpes and CEA, F-38054 Grenoble, France
*
Author to whom correspondence should be addressed.
Academic Editor: Alexander V. Sergienko
Received: 30 November 2015 / Revised: 7 March 2016 / Accepted: 8 March 2016 / Published: 11 March 2016
(This article belongs to the Special Issue Quantum Metrology)
View Full-Text   |   Download PDF [5317 KB, uploaded 11 March 2016]   |  

Abstract

The definition of the ampere will change in the next few years. This electrical base unit of the S.I. will be redefined by fixing the value of the charge quantum, i.e., the electron charge e. As a result electron pumps will become the natural device for the mise en pratique of this new ampere. In the last years semiconductor electron pumps have emerged as the most advanced systems, both in terms of speed and precision. Another figure of merit for a metrological device would be its ability to be predictible and shared. For that reason a mature fabrication process would certainly be an advantage. In this article we present electron pumps made within a CMOS (Complementary Metal Oxide Semiconductor) research facility on 300 mm silicon-on-insulator wafers, using advanced microelectronics tools and processes. We give an overview of the whole integration scheme and emphasize the fabrication steps which differ from the normal CMOS route. View Full-Text
Keywords: electron pumps; electrical quantum metrology; microelectronics; MOSFETs electron pumps; electrical quantum metrology; microelectronics; MOSFETs
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Barraud, S.; Lavieville, R.; Hutin, L.; Bohuslavskyi, H.; Vinet, M.; Corna, A.; Clapera, P.; Sanquer, M.; Jehl, X. Development of a CMOS Route for Electron Pumps to Be Used in Quantum Metrology. Technologies 2016, 4, 10.

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