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Coatings 2018, 8(8), 266; https://doi.org/10.3390/coatings8080266

Surface Analysis and Optical Properties of Cu-Doped ZnO Thin Films Deposited by Radio Frequency Magnetron Sputtering

1
Department of Materials Science and Engineering, I-Shou University, Kaohsiung 840, Taiwan
2
Department of Electrophysics, National Chiao Tung University, Hsinchu 300, Taiwan
*
Author to whom correspondence should be addressed.
Received: 19 June 2018 / Revised: 16 July 2018 / Accepted: 29 July 2018 / Published: 31 July 2018
(This article belongs to the Special Issue Advanced Thin Films Deposited by Magnetron Sputtering)
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Abstract

In this study, Cu-doped ZnO (CZO) thin films were grown on glass substrates by using the radio frequency magnetron sputtering technique. The effects of Cu doping on the structural, surface morphological, optical properties, and wettability behaviors of CZO thin films were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), UV-Visible spectroscopy, and contact angle measurement, respectively. The XRD results indicated that all CZO thin films were textured, having a preferential crystallographic orientation along the hexagonal wurtzite (002) axis. The average transmittance in the visible wavelength region was above 80% for all CZO thin films. The optical band gap of the CZO films decreased from 3.18 to 2.85 eV when the Cu-doping was increased from 2% to 10%. In addition, the water contact angle measurements were carried out to delineate the Cu-doping effects on the changes in the surface energy and wettability of the films. View Full-Text
Keywords: Cu-doped ZnO thin film; XRD; AFM; UV-Vis; surface energy Cu-doped ZnO thin film; XRD; AFM; UV-Vis; surface energy
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Chen, G.-J.; Jian, S.-R.; Juang, J.-Y. Surface Analysis and Optical Properties of Cu-Doped ZnO Thin Films Deposited by Radio Frequency Magnetron Sputtering. Coatings 2018, 8, 266.

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