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Coatings 2018, 8(2), 81;

Tunnel Oxides Formed by Field-Induced Anodisation for Passivated Contacts of Silicon Solar Cells

School of Photovoltaic and Renewable Energy Engineering, UNSW, Sydney, NSW 2052, Australia
Mark Wainwright Analytical Centre, UNSW, Sydney, NSW 2052, Australia
Author to whom correspondence should be addressed.
Received: 5 January 2018 / Revised: 15 February 2018 / Accepted: 19 February 2018 / Published: 23 February 2018
(This article belongs to the Special Issue Advanced Surface Passivation Processes for Solar Cells)
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Tunnel silicon oxides form a critical component for passivated contacts for silicon solar cells. They need to be sufficiently thin to allow carriers to tunnel through and to be uniform both in thickness and stoichiometry across the silicon wafer surface, to ensure uniform and low recombination velocities if high conversion efficiencies are to be achieved. This paper reports on the formation of ultra-thin silicon oxide layers by field-induced anodisation (FIA), a process that ensures uniform oxide thickness by passing the anodisation current perpendicularly through the wafer to the silicon surface that is anodised. Spectroscopical analyses show that the FIA oxides contain a lower fraction of Si-rich sub-oxides compared to wet-chemical oxides, resulting in lower recombination velocities at the silicon and oxide interface. This property along with its low temperature formation highlights the potential for FIA to be used to form low-cost tunnel oxide layers for passivated contacts of silicon solar cells. View Full-Text
Keywords: tunnel silicon oxide; passivated contact; silicon solar cell; anodisation tunnel silicon oxide; passivated contact; silicon solar cell; anodisation

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Tong, J.; Lim, S.; Lennon, A. Tunnel Oxides Formed by Field-Induced Anodisation for Passivated Contacts of Silicon Solar Cells. Coatings 2018, 8, 81.

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