Next Article in Journal
Comparison of Single-Layer and Double-Layer Anti-Reflection Coatings Using Laser-Induced Damage Threshold and Photothermal Common-Path Interferometry
Next Article in Special Issue
A Novel Technique for the Deposition of Bismuth Tungstate onto Titania Nanoparticulates for Enhancing the Visible Light Photocatalytic Activity
Previous Article in Journal
Ultra Low Noise Poroelastic Road Surfaces
Previous Article in Special Issue
On the Novel Biaxial Strain Relaxation Mechanism in Epitaxial Composition Graded La1−xSrxMnO3 Thin Film Synthesized by RF Magnetron Sputtering
Article Menu
Issue 2 (June) cover image

Export Article

Open AccessArticle
Coatings 2016, 6(2), 19; doi:10.3390/coatings6020019

Sputter-Deposited Indium–Tin Oxide Thin Films for Acetaldehyde Gas Sensing

Department of Engineering Sciences, The Ångström Laboratory, Uppsala University, P.O. Box 534, SE-751 21 Uppsala, Sweden
*
Author to whom correspondence should be addressed.
Academic Editor: Joaquim Carneiro
Received: 24 March 2016 / Revised: 8 April 2016 / Accepted: 11 April 2016 / Published: 14 April 2016
View Full-Text   |   Download PDF [4629 KB, uploaded 14 April 2016]   |  

Abstract

Reactive dual-target DC magnetron sputtering was used to prepare In–Sn oxide thin films with a wide range of compositions. The films were subjected to annealing post-treatment at 400 °C or 500 °C for different periods of time. Compositional and structural characterizations were performed by X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, X-ray diffraction, Rutherford backscattering and scanning electron microscopy. Films were investigated for gas sensing at 200 °C by measuring their resistance response upon exposure to acetaldehyde mixed with synthetic air. We found that the relative indium-to-tin content was very important and that measurable sensor responses could be recorded at acetaldehyde concentrations down to 200 ppb, with small resistance drift between repeated exposures, for both crystalline SnO2-like films and for amorphous films consisting of about equal amounts of In and Sn. We also demonstrated that it is not possible to prepare crystalline sensors with intermediate indium-to-tin compositions by sputter deposition and post-annealing up to 500 °C. View Full-Text
Keywords: indium tin oxide; magnetron sputtering; gas sensor; acetaldehyde indium tin oxide; magnetron sputtering; gas sensor; acetaldehyde
Figures

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Cindemir, U.; Lansåker, P.C.; Österlund, L.; Niklasson, G.A.; Granqvist, C.-G. Sputter-Deposited Indium–Tin Oxide Thin Films for Acetaldehyde Gas Sensing. Coatings 2016, 6, 19.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Coatings EISSN 2079-6412 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top