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Coatings 2016, 6(1), 13; doi:10.3390/coatings6010013

Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings

Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego 11/17, 50-372 Wroclaw, Poland
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Academic Editor: Desmond Gibson
Received: 18 January 2016 / Revised: 14 March 2016 / Accepted: 17 March 2016 / Published: 22 March 2016
(This article belongs to the Special Issue Recent Advances in Optical Coatings)
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Abstract

In this paper the influence of material composition on the structural, surface and optical properties of HfO2-TiO2 mixed oxide coatings was investigated and discussed. Five sets of thin films were deposited using reactive magnetron sputtering: HfO2, TiO2 and three sets of mixed HfO2-TiO2 coatings with various titanium content. The change in the material composition had a significant influence on the structural, surface and optical properties. All of the deposited coatings, except for (Hf0.55Ti0.45)Ox, were nanocrystalline with crystallites ranging from 6.7 nm to 10.8 nm in size. Scanning electron microscopy measurements revealed that surface of nanocrystalline thin films consisted of grains with different shapes and sizes. Based on optical transmission measurements, it was shown that thin films with higher titanium content were characterized by a higher cut-off wavelength, refractive index and lower optical band gap energy. The porosity and packing density were also determined. View Full-Text
Keywords: TiO2; HfO2; mixed oxides; optical coatings; magnetron sputtering; structural properties; optical properties TiO2; HfO2; mixed oxides; optical coatings; magnetron sputtering; structural properties; optical properties
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Mazur, M.; Kaczmarek, D.; Domaradzki, J.; Wojcieszak, D.; Poniedzialek, A. Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings. Coatings 2016, 6, 13.

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