Coatings 2013, 3(3), 126-139; doi:10.3390/coatings3030126

AZO Thin Films by Sol-Gel Process for Integrated Optics

Received: 25 May 2013; in revised form: 26 June 2013 / Accepted: 26 June 2013 / Published: 3 July 2013
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Undoped and aluminum-doped zinc oxide (AZO) thin films are prepared by the sol-gel process. Zinc acetate dihydrate, ethanol, and monoethanolamine are used as precursor, solvent, and stabilizer, respectively. In the case of AZO, aluminum nitrate nonahydrate is added to the precursor solution with an atomic percentage equal to 1 and 2 at.% Al. The multi thin layers are deposited by spin-coating onto glass substrates, and are transformed into ZnO upon annealing at 550 °C. Films display a strong preferential orientation, with high values for the Texture Coefficients (TC) of the (002) direction (TC(002) ≈ 3). The structural, morphological, and optical properties of the thin films as a function of aluminum content have been investigated using X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), and Scanning Electronic Microscopy (SEM). Waveguiding properties of the thin films have been also studied using m-lines spectroscopy. The results indicate that the films are monomodes at 632.8 nm with optical propagation optical losses estimated around 1.6 decibel per cm (dB/cm).
Keywords: sol-gel; doped ZnO; thin films; texture coefficients; optical properties; waveguides; integrated optics
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MDPI and ACS Style

Znaidi, L.; Touam, T.; Vrel, D.; Souded, N.; Yahia, S.B.; Brinza, O.; Fischer, A.; Boudrioua, A. AZO Thin Films by Sol-Gel Process for Integrated Optics. Coatings 2013, 3, 126-139.

AMA Style

Znaidi L, Touam T, Vrel D, Souded N, Yahia SB, Brinza O, Fischer A, Boudrioua A. AZO Thin Films by Sol-Gel Process for Integrated Optics. Coatings. 2013; 3(3):126-139.

Chicago/Turabian Style

Znaidi, Lamia; Touam, Tahar; Vrel, Dominique; Souded, Nacer; Yahia, Sana B.; Brinza, Ovidiu; Fischer, Alexis; Boudrioua, Azzedine. 2013. "AZO Thin Films by Sol-Gel Process for Integrated Optics." Coatings 3, no. 3: 126-139.

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