Next Article in Journal
Modification of the Interfacial Interaction between Carbon Fiber and Epoxy with Carbon Hybrid Materials
Next Article in Special Issue
A Flexible 360-Degree Thermal Sound Source Based on Laser Induced Graphene
Previous Article in Journal
Rapamycin Loaded Solid Lipid Nanoparticles as a New Tool to Deliver mTOR Inhibitors: Formulation and in Vitro Characterization
Previous Article in Special Issue
Erratum: Tsai, S.-L.; et al. The Coupled Photothermal Reaction and Transport in a Laser Additive Metal Nanolayer Simultaneous Synthesis and Pattering for Flexible Electronics. Nanomaterials 2016, 6, 12
Article Menu

Export Article

Open AccessArticle
Nanomaterials 2016, 6(5), 88; doi:10.3390/nano6050088

Investigation of the Structural, Electrical, and Optical Properties of the Nano-Scale GZO Thin Films on Glass and Flexible Polyimide Substrates

Department of Electrical Engineering and Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402, Taiwan
Department of Electrical Engineering, Kun-Shan University, Tainan 710, Taiwan
Department of Mechanical Engineering, National Kaohsiung University of Applied Science, Kaohsiung 807, Taiwan
Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung 81141, Taiwan
Author to whom correspondence should be addressed.
Academic Editor: Chih-hung Chang
Received: 7 March 2016 / Revised: 21 April 2016 / Accepted: 29 April 2016 / Published: 10 May 2016
View Full-Text   |   Download PDF [4198 KB, uploaded 10 May 2016]   |  


In this study, Ga2O3-doped ZnO (GZO) thin films were deposited on glass and flexible polyimide (PI) substrates at room temperature (300 K), 373 K, and 473 K by the radio frequency (RF) magnetron sputtering method. After finding the deposition rate, all the GZO thin films with a nano-scale thickness of about 150 ± 10 nm were controlled by the deposition time. X-ray diffraction patterns indicated that the GZO thin films were not amorphous and all exhibited the (002) peak, and field emission scanning electron microscopy showed that only nano-scale particles were observed. The dependences of the structural, electrical, and optical properties of the GZO thin films on different deposition temperatures and substrates were investigated. X-ray photoemission spectroscopy (XPS) was used to measure the elemental composition at the chemical and electronic states of the GZO thin films deposited on different substrates, which could be used to clarify the mechanism of difference in electrical properties of the GZO thin films. In this study, the XPS binding energy spectra of Ga2p3/2 and Ga2p1/2 peaks, Zn2p3/2 and Zn2p1/2 peaks, the Ga3d peak, and O1s peaks for GZO thin films on glass and PI substrates were well compared. View Full-Text
Keywords: Ga2O3-doped ZnO (GZO) thin film; glass; polyimide (PI); X-ray photoelectron spectroscopy (XPS) Ga2O3-doped ZnO (GZO) thin film; glass; polyimide (PI); X-ray photoelectron spectroscopy (XPS)

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Wang, F.-H.; Chen, K.-N.; Hsu, C.-M.; Liu, M.-C.; Yang, C.-F. Investigation of the Structural, Electrical, and Optical Properties of the Nano-Scale GZO Thin Films on Glass and Flexible Polyimide Substrates. Nanomaterials 2016, 6, 88.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Nanomaterials EISSN 2079-4991 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top