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Erratum: Tsai, S.-L.; et al. The Coupled Photothermal Reaction and Transport in a Laser Additive Metal Nanolayer Simultaneous Synthesis and Pattering for Flexible Electronics. Nanomaterials 2016, 6, 12
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Nanomaterials 2016, 6(5), 88; doi:10.3390/nano6050088

Investigation of the Structural, Electrical, and Optical Properties of the Nano-Scale GZO Thin Films on Glass and Flexible Polyimide Substrates

1
Department of Electrical Engineering and Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402, Taiwan
2
Department of Electrical Engineering, Kun-Shan University, Tainan 710, Taiwan
3
Department of Mechanical Engineering, National Kaohsiung University of Applied Science, Kaohsiung 807, Taiwan
4
Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung 81141, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editor: Chih-hung Chang
Received: 7 March 2016 / Revised: 21 April 2016 / Accepted: 29 April 2016 / Published: 10 May 2016
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Abstract

In this study, Ga2O3-doped ZnO (GZO) thin films were deposited on glass and flexible polyimide (PI) substrates at room temperature (300 K), 373 K, and 473 K by the radio frequency (RF) magnetron sputtering method. After finding the deposition rate, all the GZO thin films with a nano-scale thickness of about 150 ± 10 nm were controlled by the deposition time. X-ray diffraction patterns indicated that the GZO thin films were not amorphous and all exhibited the (002) peak, and field emission scanning electron microscopy showed that only nano-scale particles were observed. The dependences of the structural, electrical, and optical properties of the GZO thin films on different deposition temperatures and substrates were investigated. X-ray photoemission spectroscopy (XPS) was used to measure the elemental composition at the chemical and electronic states of the GZO thin films deposited on different substrates, which could be used to clarify the mechanism of difference in electrical properties of the GZO thin films. In this study, the XPS binding energy spectra of Ga2p3/2 and Ga2p1/2 peaks, Zn2p3/2 and Zn2p1/2 peaks, the Ga3d peak, and O1s peaks for GZO thin films on glass and PI substrates were well compared. View Full-Text
Keywords: Ga2O3-doped ZnO (GZO) thin film; glass; polyimide (PI); X-ray photoelectron spectroscopy (XPS) Ga2O3-doped ZnO (GZO) thin film; glass; polyimide (PI); X-ray photoelectron spectroscopy (XPS)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Wang, F.-H.; Chen, K.-N.; Hsu, C.-M.; Liu, M.-C.; Yang, C.-F. Investigation of the Structural, Electrical, and Optical Properties of the Nano-Scale GZO Thin Films on Glass and Flexible Polyimide Substrates. Nanomaterials 2016, 6, 88.

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