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Appl. Sci. 2018, 8(3), 468; https://doi.org/10.3390/app8030468

Development and Characterization of Two-Dimensional Gratings for Single-Shot X-ray Phase-Contrast Imaging

1
Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
2
Karlsruhe Institute of Technology (KIT), Institute of Photon Science and Synchrotron Radiation (IPS), Herrmann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
*
Author to whom correspondence should be addressed.
Received: 22 December 2017 / Revised: 6 March 2018 / Accepted: 16 March 2018 / Published: 18 March 2018
(This article belongs to the Special Issue Advanced EUV and X-Ray Optics)
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Abstract

Single-shot grating-based phase-contrast imaging techniques offer additional contrast modalities based on the refraction and scattering of X-rays in a robust and versatile configuration. The utilization of a single optical element is possible in such methods, allowing the shortening of the acquisition time and increasing flux efficiency. One of the ways to upgrade single-shot imaging techniques is to utilize customized optical components, such as two-dimensional (2D) X-ray gratings. In this contribution, we present the achievements in the development of 2D gratings with UV lithography and gold electroplating. Absorption gratings represented by periodic free-standing gold pillars with lateral structure sizes from 5 µm to 25 µm and heights from 5 µm to 28 µm have shown a high degree of periodicity and defect-free patterns. Grating performance was tested in a radiographic setup using a self-developed quality assessment algorithm based on the intensity distribution histograms. The algorithm allows the final user to estimate the suitability of a specific grating to be used in a particular setup. View Full-Text
Keywords: 2D gratings; UV lithography; grating-based X-ray imaging; single-shot phase-contrast imaging 2D gratings; UV lithography; grating-based X-ray imaging; single-shot phase-contrast imaging
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Zakharova, M.; Vlnieska, V.; Fornasier, H.; Börner, M.; Rolo, T.S.; Mohr, J.; Kunka, D. Development and Characterization of Two-Dimensional Gratings for Single-Shot X-ray Phase-Contrast Imaging. Appl. Sci. 2018, 8, 468.

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