Next Article in Journal
Vibrotactile Display of Flight Attitude with Combination of Multiple Coding Parameters
Previous Article in Journal
Functional Elastic Knits Made of Bamboo Charcoal and Quick-Dry Yarns: Manufacturing Techniques and Property Evaluations
Article Menu
Issue 12 (December) cover image

Export Article

Open AccessArticle
Appl. Sci. 2017, 7(12), 1289; doi:10.3390/app7121289

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

1
Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
2
Department of Civil and Environmental Engineering, National University of Kaohsiung, Kaohsiung 811, Taiwan
3
Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan 320, Taiwan
*
Author to whom correspondence should be addressed.
Received: 17 October 2017 / Revised: 7 December 2017 / Accepted: 7 December 2017 / Published: 11 December 2017
View Full-Text   |   Download PDF [4005 KB, uploaded 12 December 2017]   |  

Abstract

This study develops a three-axis magnetic field (MF) microsensor manufactured by a complementary metal oxide semiconductor (CMOS) process. The MF microsensor contains a ring emitter, four bases, and eight collectors. Sentaurus TCAD was used to simulate the microsensor characterization. The STI (shallow trench isolation) oxide in the process was used to limit the current direction and reduce leakage current. The microsensor produces a voltage difference once it senses a magnetic field. An amplifier circuitry magnifies voltage difference into a voltage output. Experiments reveals that the MF microsensor has a sensitivity of 1.45 V/T along the x-axis and a sensitivity of 1.37 V/T along the y-axis. View Full-Text
Keywords: magnetic field sensor; magnetotransistor; CMOS process; MEMS magnetic field sensor; magnetotransistor; CMOS process; MEMS
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Tseng, J.-Z.; Shih, P.-J.; Hsu, C.-C.; Dai, C.-L. A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process. Appl. Sci. 2017, 7, 1289.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Appl. Sci. EISSN 2076-3417 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top