Next Article in Journal
Dynamically Determining the Toll Plaza Capacity by Monitoring Approaching Traffic Conditions in Real-Time
Next Article in Special Issue
Development of an Abbe Error Free Micro Coordinate Measuring Machine
Previous Article in Journal
Erratum: Jonathan Driedger and Meinard Müller. A Review of Time-Scale Modification of Music Signals. Applied Sciences 2016, 6, 57
Article Menu

Export Article

Open AccessArticle
Appl. Sci. 2016, 6(3), 86; doi:10.3390/app6030086

Development of a High-Precision Touch-Trigger Probe Using a Single Sensor

1
School of Instrument Science and Opto-electric Engineering, Hefei University of Technology, Hefei 230009, China
2
Anhui Electrical Engineering Professional Technique College, Hefei 230051, China
3
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
This paper is an extended version of paper published in the 9th International Symposium on Precision Engineering, Measurements and Instrumentation conference (ISPEMI9), Changsha, China, 8–11 August 2014.
*
Author to whom correspondence should be addressed.
Academic Editor: Chien-Hung Liu
Received: 30 January 2016 / Revised: 4 March 2016 / Accepted: 14 March 2016 / Published: 18 March 2016
(This article belongs to the Special Issue Design and Applications of Coordinate Measuring Machines)
View Full-Text   |   Download PDF [4424 KB, uploaded 18 March 2016]   |  

Abstract

To measure various components with nano-scale precision, a new high-precision touch-trigger probe using a single low-cost sensor for a micro-coordinate measuring machine (CMM) is presented in this paper. The sensor is composed of a laser diode, a plane mirror, a focusing lens, and a quadrant photo detector (QPD). The laser beam from the laser diode with an incident angle is reflected by the plane mirror and then projected onto the quadrant photo detector (QPD) via the focusing lens. The plane mirror is adhered to the upper surface of the floating plate supported by an elastic mechanism, which can transfer the displacement of the stylus’s ball tip in 3D to the plane mirror’s vertical and tilt movement. Both motions of the plane mirror can be detected by respective QPDs. The probe mechanism was analyzed, and its structural parameters that conform to the principle of uniform sensitivity and uniform stiffness were obtained. The simulation result showed that the stiffness was equal in 3D and less than 1 mN/µm. Some experiments were performed to investigate the probe’s characteristics. It was found that the probe could detect the trigger point with uniform sensitivity, a resolution of less than 5 nm, and a repeatability of less than 4 nm. It can be used as a touch-trigger probe on a micro/nano-CMM. View Full-Text
Keywords: touch-trigger probe; stiffness; quadrant photo detector; coordinate measuring machine touch-trigger probe; stiffness; quadrant photo detector; coordinate measuring machine
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Li, R.-J.; Xiang, M.; He, Y.-X.; Fan, K.-C.; Cheng, Z.-Y.; Huang, Q.-X.; Zhou, B. Development of a High-Precision Touch-Trigger Probe Using a Single Sensor. Appl. Sci. 2016, 6, 86.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Appl. Sci. EISSN 2076-3417 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top