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Machines 2015, 3(2), 107-122; doi:10.3390/machines3020107

A Non-Photolithography Fabrication for a Microfluidic Chip Based on PMMA Polymer

1
Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin Institute of Technology, Harbin 150000, China
2
School of Microelectronics, Shanghai Jiao Tong University, Shanghai 200240, China
*
Author to whom correspondence should be addressed.
Academic Editor: David Mba
Received: 25 March 2015 / Revised: 4 May 2015 / Accepted: 7 May 2015 / Published: 21 May 2015
View Full-Text   |   Download PDF [665 KB, uploaded 22 May 2015]   |  

Abstract

Polymer microchannels can be commonly processed using many non-lithographic methods for reducing the manufacturing cost and steps. In this research, an inexpensive and high-precision thermal engraving technology is developed and achieved to machine polymer microchannels ranging from tens to hundreds of micrometers. This paper presents the design of a thermal engraving device, the processing method and the experimental procedure. Thermal engraving microscribers can fabricate microchannels with a width less than 100 μm. Furthermore, the effects of velocity and temperature on the roughness of polymethyl methacrylate (PMMA) microchannels are also discussed. Finally, a smooth microchannel with these parameters optimally coordinated is achieved. Meanwhile, the contact angle (CA) and the electro-osmotic flow (EOF) of microchannels fabricated by this technology are also measured. The experimental results show that this method of fabrication has the advantages of low cost, high efficiency and small polymer microchannel size compared with several non-lithographic methods. This method of fabrication would be attractive for labs lacking extremely clean rooms and expensive photolithography apparatuses. View Full-Text
Keywords: PMMA; microfluidic chip; microchannel fabrication; micromachining PMMA; microfluidic chip; microchannel fabrication; micromachining
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Han, X.; Liu, X.; Tian, L.; Zhang, H.; Mao, Z.-G. A Non-Photolithography Fabrication for a Microfluidic Chip Based on PMMA Polymer. Machines 2015, 3, 107-122.

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