Polymers 2014, 6(3), 604-612; doi:10.3390/polym6030604

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Received: 3 February 2014; in revised form: 16 February 2014 / Accepted: 27 February 2014 / Published: 5 March 2014
(This article belongs to the Special Issue Patterning and Photosensitive Polymers)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: As a breakthrough in the cost and durability of molds for nanoimprint lithography (NIL), replica molds are fabricated by injection compression molding (ICM). ICM is commonly used for optical disks such as DVDs or Blu-ray disks and is also a practical fabrication method for nanostructures. In this paper, I successfully demonstrated the fabrication of cycloolefin polymer replica molds with structures smaller than 60 nm by ICM. Furthermore, ultraviolet (UV)-NIL using these replica molds was demonstrated. UV-cured resist was replicated over an area of 60 mm diameter. The degree of replication by UV-NIL in the first usage of each replica mold had good repeatability. Because ICM is a high-throughput, low-cost process, the replica mold can be disposed of after a certain time for UV-NIL. This method leads to a high-integrity UV-NIL process of patterned media because multiple large-area replica molds can be fabricated simultaneously.
Keywords: injection compression molding; replica mold; nanoimprint lithography
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MDPI and ACS Style

Nagato, K. Injection Compression Molding of Replica Molds for Nanoimprint Lithography. Polymers 2014, 6, 604-612.

AMA Style

Nagato K. Injection Compression Molding of Replica Molds for Nanoimprint Lithography. Polymers. 2014; 6(3):604-612.

Chicago/Turabian Style

Nagato, Keisuke. 2014. "Injection Compression Molding of Replica Molds for Nanoimprint Lithography." Polymers 6, no. 3: 604-612.

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