_{4}Plates

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The propagation of both surface and flexural acoustic plate modes along _{4} piezoelectric substrates was studied for several _{4} intrinsic properties, such as its resistance to high temperature and its chemical inertness, make it especially attractive for the development of acoustic waves-based sensors for applications in harsh liquid environment.

_{4}

The electroacoustic devices based on the surface and bulk acoustic waves (SAW and BAW) propagation, such as resonators or delay lines, are known for their wide range of applications in chemical, biological and physical sensing fields. When these devices are required to operate in a liquid environment, they must involve the propagation of specific types of acoustic waves that do not radiate energy into the liquid. The types of acoustic waves that are suitable as the sensing elements in liquid environments include Love waves and surface transverse waves (STW), travelling along the surface of a semi-infinite piezoelectric medium, and shear horizontal acoustic plate modes (SHAPM), travelling along a piezoelectric finite thickness plate. The shear horizontal polarization of these modes ensures no coupling between the liquid and the elastic propagating medium [_{0}, while being elliptically polarized, can travel along thin plates that are in contact with a liquid, but only at a specific plate thickness. As a consequence of the A_{0} mode dispersive phase velocity, it can be designed to travel at a velocity lower than the compressional velocity of the surrounding liquid medium. The plate acts as a waveguide where the ultrasonic wave energy is confined rather than dispersed into the surrounding medium, and only the evanescent wave penetrates the fluid. The fundamental symmetric Lamb mode, S_{0}, as well as the higher order symmetrical and antisymmetrical modes have comparable longitudinal, shear-horizontal and shear-vertical displacement components, and velocity higher than that of the surrounding liquid medium, and thus they are not suitable for sensing application in liquids except in some special cases. These cases include linearly polarized modes, such as the longitudinally polarized Anisimkin Jr. (AMs) and the quasi longitudinal (QLMs) modes, and the quasi shear horizontal (QSH) modes with negligible particle displacement components perpendicular to the plate surfaces. The polarization of the AMs is predominantly longitudinal and uniform through the plate thickness, being the shear vertical and horizontal particle displacement components negligible. A mode is classified as QLM if the longitudinal displacement component is dominant but not constant through the plate thickness, being the other two shear components much smaller than the longitudinal one. The AMs and QLMs, while having high phase velocity (close to that of the longitudinal bulk acoustic wave, LBAW, traveling in the same direction) are suitable for high operation frequency _{3} 128° _{3}, LiTaO_{3}, Te, Ba_{2}NaNb_{5}O_{15}, KH_{2}PO_{4}, Li_{2}B_{4}O_{7}, TeO_{2}, PbMoO_{4}, KDP and ZnO. Viscosity sensors with high-sensitivity, low-insertion loss, and good stop-band rejection were implemented on quartz, LiNbO_{3} and LiTaO_{3} [_{4}, LiNbO_{3} and LiTaO_{3}, are not suitable to work at high temperature as they undergo α to β phase transition at temperature in the range from about 300 to 588 °C. Unlike these conventional piezoelectric materials, GaPO_{4} exhibits stable properties up to 900 °C. It exhibits a high piezoelectric sensitivity and strong electromechanical coupling up to about 970 °C and is fully stable against organic solvents, such as ethanol, isopropanol, acetone, ethyl-methyl ketone, and dimenthylformamide. GaPO_{4} is also stable in aqueous solutions in the 3 to 8.5 pH range: outside this range, it is etched, except by concentrated H_{2}SO_{4} [_{4} shows performances superior to quartz such as thermal stability, piezoelectric coupling and temperature compensated cuts for BAW and SAW applications. All these properties make GaPO_{4} a very attractive choice for a wide range of high-temperature, harsh environment applications, such as for the monitoring of process variables, such as viscosity of melts, evaluation of material integrity in harsh environments, e.g., turbine blades, combustion engines and nuclear reactors.

New viable modes,

The present paper investigate the acoustic waves propagation along _{4} substrates for several

The SAW propagating along the _{4} substrate is a generalized SAW (GSAW) as it has three particle displacement components (the longitudinal _{1}, the shear horizontal and vertical, _{2} and _{3}) that rapidly decrease in depth. The GSAW phase velocity is strongly affected by the cut angle, as shown in

The bulk acoustic wave (BAW) and generalized surface acoustic wave (GSAW) angular dispersion curves, and the GSAW ^{2} angular dispersion curves along (0° θ 0°) GaPO_{4} substrate.

In _{4} plate and is expressed in the Euler notation. The GSAW phase velocity along (0° θ 0°) GaPO_{4} is lower than that of the SSBAW except for the 162° ≤ θ ≤ 169° range. While varying the cut angle and the velocity moving toward the SSBAW velocity, the shear horizontal amplitude U_{2} of the GSAW decreases more and more slowly in the depth and the GSAW loses energy into the bulk. The electromechanical coupling coefficient, ^{2}, is a measure of the electrical to acoustic energy conversion efficiency and it was calculated as 2 × (_{f} − _{m})/_{f}, being _{f} and _{m} the GSAW velocity along the free surface and the surface covered by a infinitesimally thin conductive film. The ^{2} angular dispersion curve is also shown in ^{2} value is equal to 1.22% and it is reached at θ = 110°; while the velocity moving toward the SBAW velocity, the GSAW ^{2} approaches the zero value, in accordance with the increased _{2} contribution in the depth. The acoustic waves velocity calculations along GaPO_{4} were performed by using Matlab and the software from McGill University [_{4} material data (the mass density, the elastic, piezoelectric, dielectric constants) as well as the thermal expansion coefficients and the third order temperature coefficients of the elastic constants, valid in the −50 °C < _{4} wafers suppliers.

The FPWs propagating along a thin plate consist in two sets of infinite modes: the symmetric waves, whose particle displacements are symmetric about the central plane of the plate, and the antisymmetric waves, whose displacements have odd symmetry about the central plane of the plate. For sufficiently thin plate, only the first symmetric and antisymmetric modes, S_{0} and A_{0}, propagate: _{4} plate as an example.

Dispersion curves of the fundamental and higher order modes propagating along (0° 90° 0°) GaPO_{4} plate.

The A_{0} mode is clearly identified by its reducing velocity as the plate thickness approaches zero. On the contrary, the dispersion curve of the S_{0} mode is characterized by a low dispersion region, where itsvelocity is almost constant and _{LBAW}, followed by a drop in velocity. The magnitude of the flat zone of the dispersion curve depends on the rotation angle θ, as can be seen in _{0} velocity dispersion curves are shown for different rotating angles and for plate thickness normalized to the acoustic wavelength,

S_{0} velocity dispersion curves for different rotating angles.

For very small thicknesses, _{0} velocity increases slowly and reaches a plateau where the velocity is close to the LBAW velocity. In this flat region, for plate thicknesses up to a value that depends on θ, hereafter mentioned _{AM}, the S_{0} mode transforms for first to the AM counterpart with constant and dominant longitudinal displacement. Subsequently, the mode transforms to the QL counterpart for increasing the plate thicknesses up to _{QLM}: The longitudinal displacement component is no longer constant through the thickness of the plate and is dominant over the other two components. For higher plate thicknesses, the S_{0} mode is characterized by three particle displacement components and, when the velocity approaches the shear horizontal BAW velocity, the U_{2} component largely dominates over _{1} and _{3}. For large

In the present paper, the S_{0} and A_{0} modes propagation along GaPO_{4} plates is studied for two different coupling structures as depicted in ^{2} depends very strongly on θ, on the electrical boundary conditions and on the plate thickness. With increasing the plate thickness, for ^{2} moves toward the ^{2} of the GSAW that propagates along the _{4} semi-infinite substrate.

The Substrate/Transducer (ST) and Metal/Substrate/Transducer (MST) coupling configurations.

The ^{2} dispersion curves of the S_{0} and A_{0} modes were studied for the ST and MST structures by calculating the perturbation of the phase velocity when the tangential electric field component is shorted out at the plate surface. For each configuration ^{2} was approximated to be 2 × [(_{f} − _{m})/_{f}], where _{m} and _{f} are the phase velocities along the structures with and without the IDTs, under the assumption that a perfect conductor is placed at both the IDT and the ground electrode position. The ^{2} dispersion curves of each configuration were calculated for different plate thicknesses normalized to the acoustic wavelength, ^{2} values much higher than that of the SAW travelling in the same direction and crystal plane can be reached in thin plates (_{0} and A_{0} modes, even for that cut angles for which the SAW has a ^{2} = 0%. The ^{2} angular dispersion curves of the S_{0} mode in both the ST and MST configurations have similar behavior: The ^{2} reaches a peak for small plate thickness (at about ^{2} of the SAW. _{0} mode ^{2} dispersion curves of the two configurations in (0° 85° 0°) _{4}. The ^{2} dispersion curve of the MST configuration has a second broad peak at ^{2} of the SAW: With increasing the plate thickness, the ^{2} decreases and then, for ^{2} of the SAW travelling on the free surface of the plate.

The S_{0} mode ^{2} dispersion of the two configurations in (0° 85° 0°) _{4}.

^{2} angular dispersion curve of the SAW travelling along the free plate surface, and the angular dispersion curves of the maximum ^{2} value achievable by the S_{0} mode for the two coupling configurations. The ^{2} peak value of the ST configuration is higher than the ^{2} of the SAW for θ ≤ 90° and >150°, while that of the MST configuration is higher only for θ ranging from 0° to 30° and θ >140°.

The angular dispersion curves of the maximum ^{2} value achievable with the two S_{0} mode coupling configurations and the SAW ^{2} angular dispersion.

The highest coupling efficiency of the S_{0} mode is around 1.2%, and it is reached by the ST configuration at

As an example, _{4} plate with _{2} >> U_{1}, U_{3} across the depth are satisfied, and _{SHBAW}. This type of mode is largely applied for sensing applications in liquid environments [

The field profile of the shear horizontal (SH) wave travelling along (0° 75° 0°)

The A_{0} mode is far more efficient than the S_{0} and its most efficient of the two configurations is the MST for all the θ values from 0° to 180°. The ^{2} dispersion curves of the A_{0} mode depends on θ, on the electrical boundary conditions and on the plate thickness: These curves have a peak value at ^{2} of the SAW with increasing the plate thickness. As an example, ^{2} dispersion curves of the two A_{0}-based configurations on (0° 95° 0°) _{4}.

The ^{2} of the two A_{0} coupling configurations on (0° 95° 0°) _{4}.

^{2} peaks of the A_{0} mode for the two coupling configurations. ^{2} as high as 1.9% and 2.64% can be reached by the ST and MST configurations for θ = 95°, and for plate thickness equal to

The angular dispersion of the ^{2} peaks of the A_{0} mode for the two coupling configurations.

The A_{0} mode, while being elliptically polarized, can travel along thin membranes that are in contact with a liquid as a consequence of its dispersive phase velocity that can be designed to be lower than the liquid medium compressional velocity, at the proper plate thickness. The phase velocity corresponding to the ^{2} peak values is 1888 and 1583 m/s for the ST and MST configurations, respectively. Thus, a little decrease in ^{2} has to be accepted to reduce the velocity of the A_{0} mode up to a value lower than the velocity of the fluid environment (about 1500 m/s for water). Another benefit of the low-velocity A_{0} mode is that it allows for inexpensive signal processing equipment to be used, due to its low resonant frequency

In references [_{1} with constant amplitude along the whole depth of the plate, being the shear components, _{2} and _{3}, at least 10 times less than _{1} at any plate depth. The propagation of the AMs was investigated by studying the field profile of the modes that propagate along the plate with a phase velocity close to that of the LBAW: Plate thicknesses up to _{1} surface value _{4} plate with

The field profile of the Anisimkin Jr. mode (AM) propagating at velocity _{4} plate

_{1} = 1, _{2}, _{3} ≤ 0.1 across the plate depth and _{LBAW} are satisfied and the maximum ^{2} value achievable in this thickness range, for the ST and MST configurations, as a function of the substrate

As can be seen, the ST configuration is the most favorable as it ensures the highest ^{2} at the largest plate thickness: the latter characteristic is particularly important as it is difficult to fabricate and handle a device implemented on a thin and fragile plate.

The AMs plate thickness range, 0–_{AM}, and the peak ^{2} of the two configurations

The temperature coefficient of velocity (_{T}_{°C} − _{20} _{°C})/v_{20} _{°C}, that is linked to the _{AMs}, over which the AMs propagate. The calculated _{T}_{°C} and _{20} _{°C} the wave velocity at a certain temperature value between −20 and 420 °C, and at 20°C, respectively. The relative velocity shift (_{T}_{°C} − _{20} _{°C})/_{20} _{°C} _{AMs} range for each _{1} and A_{2} of the quadratic fit: The bar centered on each point refers to the coefficient evaluated at the upper (_{AMs}) and lower (0.001) plate thickness range. As can be seen in _{AMs}.

The first and second order coefficients, A_{1} and A_{2}, of the temperature coefficient of velocity (TCV) quadratic fit.

In the 60° to 90° range, the two coefficients A_{1} and A_{2} reach very small values, hence zero or very low TCD structures based on the AMs propagation can be fabricated.

The PFA is related to the incremental slope of the inverse velocity surface. The PFA of the AMs propagating along the _{4} plates was theoretically investigated in order to evaluate the effect of an electrical shorting layer on the plate surface on the PFA. In both the two cases the PFA is very small, in the 0 to 0.09 range, and it is poorly affected by the presence of a shorting layer on one plate surface.

In the present paper, a mode is attributed to the QL-family if _{1} is not constant through the plate, and _{2} and _{3} are less than 20% of _{1} at any depth. As an example, _{4} plate at

The field profile of the quasi longitudinal mode (QLM) propagating along the (0° 0° 0°) _{4} plate with

In _{AMs}–_{QLM} range, for each y rotation angle.

As compared with the AMs, the coefficients A_{1} and A_{2} of the QLMs are a little bit more temperature sensitive than those of the AMs.

As for the AMs, the PFA of the QLMs propagating along the _{4} plates is very small, in the 0 to 0.09 deg range, and poorly affected by the presence of a metal shorting layer on the plate surface.

The first and second order coefficients of the quadratic fit of the TCV of the QLMs propagating along the (0° θ 0°) GaPO_{4} plate.

The phase velocity and the coupling coefficient of surface and flexural acoustic plate modes propagating along _{4} piezoelectric substrates has been studied for several _{4} intrinsic properties, such as its resistance to high temperature and its chemical inertness, electroacoustic devices based on the propagation of AMs in GaPO_{4} are especially attractive for applications in harsh liquid environments. Moreover, such acoustic modes have not yet been fully exploited for sensing applications, thus their study introduces a new element in the landscape of the AW sensor field.

Cinzia Caliendo conceived the research and conducted all the theoretical calculations, analyzed and processed the data, and wrote the manuscript. She is the Primary Investigator. Fabio Lo Castro assisted the data analysis for graphical outputs.

The authors declare no conflict of interest.

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