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Micromachines 2018, 9(2), 64; doi:10.3390/mi9020064

Fundamental Study for a Graphite-Based Microelectromechanical System

Faculty of Engineering, Tokyo Polytechnic University, Atsugi 243-0297, Japan
Material Solutions Research Institute, KANEKA Corporation, Torikai-Nishi 5-1-1, Settsu, Osaka 566-0072, Japan
Author to whom correspondence should be addressed.
Received: 29 December 2017 / Revised: 29 January 2018 / Accepted: 31 January 2018 / Published: 2 February 2018
(This article belongs to the Special Issue Carbon Based Materials for MEMS/NEMS)


We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure. View Full-Text
Keywords: carbon-MEMS; cantilever; doubly clamped beam; resonance frequency; HOPG; graphite sheet carbon-MEMS; cantilever; doubly clamped beam; resonance frequency; HOPG; graphite sheet

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Sone, J.; Murakami, M.; Tatami, A. Fundamental Study for a Graphite-Based Microelectromechanical System. Micromachines 2018, 9, 64.

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