Fundamental Study for a Graphite-Based Microelectromechanical System
AbstractWe aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure. View Full-Text
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Sone, J.; Murakami, M.; Tatami, A. Fundamental Study for a Graphite-Based Microelectromechanical System. Micromachines 2018, 9, 64.
Sone J, Murakami M, Tatami A. Fundamental Study for a Graphite-Based Microelectromechanical System. Micromachines. 2018; 9(2):64.Chicago/Turabian Style
Sone, Junji; Murakami, Mutsuaki; Tatami, Atsushi. 2018. "Fundamental Study for a Graphite-Based Microelectromechanical System." Micromachines 9, no. 2: 64.