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Micromachines 2018, 9(1), 39; https://doi.org/10.3390/mi9010039

A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

1
Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands
2
Department of Mechanical Engineering, Eindhoven University of Technology, 5600 MB Eindhoven, The Netherlands
3
Philips Research, High Tech Campus 4, 5654 AE Eindhoven, The Netherlands
These authors should be regarded as joint first author.
*
Authors to whom correspondence should be addressed.
Received: 11 December 2017 / Revised: 10 January 2018 / Accepted: 12 January 2018 / Published: 18 January 2018
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Abstract

A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and mounting of these free-standing structures, the device is designed to be fabricated as a single chip/unit that is separated into two independently movable parts after it is fixed in the tensile test stage. Furthermore, the fabrication method allows for test structures of different geometries to be easily fabricated on the same substrate. The utility of the device has been demonstrated by stretching the free-standing interconnect structures in excess of 1000% while simultaneously measuring their electrical resistance. Important design considerations and encountered processing challenges and their solutions are discussed in this paper. View Full-Text
Keywords: stretchable electronics; stretchable interconnects; MEMS; mechanical characterization; electrical characterization; free standing interconnects stretchable electronics; stretchable interconnects; MEMS; mechanical characterization; electrical characterization; free standing interconnects
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Savov, A.; Joshi, S.; Shafqat, S.; Hoefnagels, J.; Louwerse, M.; Stoute, R.; Dekker, R. A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects. Micromachines 2018, 9, 39.

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