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Micromachines 2017, 8(5), 160; doi:10.3390/mi8050160

A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter

1
State Key Lab of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
2
Department of Biomedical Engineering, National University of Singapore, Block E4, #04-08, 4 Engineering Drive 3, Singapore 117583, Singapore
3
Institute of Microelectronics, A*STAR, 11 Science Park Road, Science Park II, Singapore 117685, Singapore
*
Author to whom correspondence should be addressed.
Academic Editors: Wei Wang and Nam-Trung Nguyen
Received: 1 March 2017 / Revised: 25 April 2017 / Accepted: 12 May 2017 / Published: 17 May 2017
(This article belongs to the Special Issue Optofluidics 2016)
View Full-Text   |   Download PDF [2196 KB, uploaded 17 May 2017]   |  

Abstract

A miniature methane sensor composed of a long ultra-low loss waveguide and a micro-ring resonator filter is proposed with high sensitivity and good selectivity. This sensor takes advantage of the evanescent field to implement methane concentration detection at a near infrared band (1650 nm). In the sensor, two waveguides, a strip waveguide and a slot waveguide, are specially designed and discussed based on three common semiconductor materials, including silica, silicon nitride, and silicon. Through simulations and numerical calculations, we determine that for the strip waveguide, the optimal evanescent field ratio (EFR) is approximately 39.8%, while the resolution is 32.1 ppb using a 15-cm waveguide length. For the slot waveguide, the optimal EFR is approximately 61.6%, and the resolution is 20.8 ppb with a 15-cm waveguide length. View Full-Text
Keywords: waveguides; photonics sensor; gas detection; optical MEMS waveguides; photonics sensor; gas detection; optical MEMS
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Qiao, Y.; Tao, J.; Chen, C.-H.; Qiu, J.; Tian, Y.; Hong, X.; Wu, J. A Miniature On-Chip Methane Sensor Based on an Ultra-Low Loss Waveguide and a Micro-Ring Resonator Filter. Micromachines 2017, 8, 160.

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