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Micromachines 2017, 8(4), 122; doi:10.3390/mi8040122

Surface Roughness of Z-Cut Quartz Etched by Ammonium Bifluoride and Ammonium Bifluoride Mixed with Isopropyl Alcohol Solutions

Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China
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Academic Editor: Joost Lötters
Received: 7 March 2017 / Revised: 30 March 2017 / Accepted: 7 April 2017 / Published: 13 April 2017
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Abstract

It is meaningful to study the surface morphology of monocrystalline material, but there are few studies on the surface roughness of quartz. So, surface roughness of Z-cut quartz etched by pure ammonium bifluoride and ammonium bifluoride mixed with isopropyl alcohol (IPA) solution was investigated for the first time in this paper. Firstly, when etching in pure ammonium bifluoride solutions, the surface roughness change with etching time, etching temperature, and solution concentration were studied. Then, the surface roughness improvement given by isopropyl alcohol solution was analyzed carefully. The experimental results indicated that: the surface roughness of Z-cut quartz (0001) plane increased with etching time, but decreased with etching temperature and solution concentration; the adding of isopropyl alcohol in ammonium bifluoride solution could decrease the roughness and improve the surface quality. This is the first systemic research of the evolution of quartz surface roughness when etching in ammonium bifluoride solution, and will benefit the future design and manufacture of quartz MEMS devices. View Full-Text
Keywords: MEMS; wet etching; quartz; surface roughness; additive MEMS; wet etching; quartz; surface roughness; additive
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MDPI and ACS Style

Zhang, Z.; Su, W.; Tang, B.; Xu, W.; Xiong, Z. Surface Roughness of Z-Cut Quartz Etched by Ammonium Bifluoride and Ammonium Bifluoride Mixed with Isopropyl Alcohol Solutions. Micromachines 2017, 8, 122.

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