Next Article in Journal
A Review of the State of Dry Adhesives: Biomimetic Structures and the Alternative Designs They Inspire
Previous Article in Journal
The Self-Propulsion of the Spherical Pt–SiO2 Janus Micro-Motor
Article Menu
Issue 4 (April) cover image

Export Article

Open AccessArticle
Micromachines 2017, 8(4), 122;

Surface Roughness of Z-Cut Quartz Etched by Ammonium Bifluoride and Ammonium Bifluoride Mixed with Isopropyl Alcohol Solutions

Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China
Author to whom correspondence should be addressed.
Academic Editor: Joost Lötters
Received: 7 March 2017 / Revised: 30 March 2017 / Accepted: 7 April 2017 / Published: 13 April 2017
Full-Text   |   PDF [2128 KB, uploaded 14 April 2017]   |  


It is meaningful to study the surface morphology of monocrystalline material, but there are few studies on the surface roughness of quartz. So, surface roughness of Z-cut quartz etched by pure ammonium bifluoride and ammonium bifluoride mixed with isopropyl alcohol (IPA) solution was investigated for the first time in this paper. Firstly, when etching in pure ammonium bifluoride solutions, the surface roughness change with etching time, etching temperature, and solution concentration were studied. Then, the surface roughness improvement given by isopropyl alcohol solution was analyzed carefully. The experimental results indicated that: the surface roughness of Z-cut quartz (0001) plane increased with etching time, but decreased with etching temperature and solution concentration; the adding of isopropyl alcohol in ammonium bifluoride solution could decrease the roughness and improve the surface quality. This is the first systemic research of the evolution of quartz surface roughness when etching in ammonium bifluoride solution, and will benefit the future design and manufacture of quartz MEMS devices. View Full-Text
Keywords: MEMS; wet etching; quartz; surface roughness; additive MEMS; wet etching; quartz; surface roughness; additive

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Zhang, Z.; Su, W.; Tang, B.; Xu, W.; Xiong, Z. Surface Roughness of Z-Cut Quartz Etched by Ammonium Bifluoride and Ammonium Bifluoride Mixed with Isopropyl Alcohol Solutions. Micromachines 2017, 8, 122.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top