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Micromachines 2017, 8(3), 70; doi:10.3390/mi8030070

A Micro-Test Structure for the Thermal Expansion Coefficient of Metal Materials

Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
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Academic Editor: Joost Lötters
Received: 15 December 2016 / Revised: 12 February 2017 / Accepted: 23 February 2017 / Published: 28 February 2017
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Abstract

An innovative micro-test structure for detecting the thermal expansion coefficient (TEC) of metal materials is presented in this work. Throughout this method, a whole temperature sensing moveable structures are supported by four groups of cascaded chevrons beams and packed together. Thermal expansion of the metal material causes the deflection of the cascaded chevrons, which leads to the capacitance variation. By detecting the capacitance value at different temperatures, the TEC value of the metal materials can be calculated. A finite element model has been established to verify the relationship between the TEC of the material and the displacement of the structure on horizontal and vertical directions, thus a function of temperature for different values of TEC can be deduced. In order to verify the analytical model, a suspended-capacitive micro-test structure has been fabricated by MetalMUMPs process and tested in a climate chamber. Test results show that in the temperature range from 30 °C to 80 °C, the TEC of the test material is 13.4 × 10−6 °C−1 with a maximum relative error of 0.8% compared with the given curve of relationship between displacement and temperature. View Full-Text
Keywords: cascaded chevrons; thermal expansion coefficient; thermal drive method; extraction method; metal materials cascaded chevrons; thermal expansion coefficient; thermal drive method; extraction method; metal materials
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ren, Q.; Wang, L.; Huang, Q. A Micro-Test Structure for the Thermal Expansion Coefficient of Metal Materials. Micromachines 2017, 8, 70.

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