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Micromachines 2017, 8(2), 53; doi:10.3390/mi8020053

Micro-Hole Drilling on Glass Substrates—A Review

1
Department of Mechanical & Industrial Engineering, Concordia University, 1455 de Maisonneuve Blvd. West, Montreal, QC H3G 1M8, Canada
2
Bharti School of Engineering, Laurentian University, Sudbury, ON P3E 2C6, Canada
*
Author to whom correspondence should be addressed.
Academic Editors: Hongrui Jiang and Nam-Trung Nguyen
Received: 14 November 2016 / Revised: 18 January 2017 / Accepted: 3 February 2017 / Published: 13 February 2017
(This article belongs to the Special Issue Glass Micromachining)
View Full-Text   |   Download PDF [1207 KB, uploaded 13 February 2017]   |  

Abstract

Glass micromachining is currently becoming essential for the fabrication of micro-devices, including micro- optical-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (μTAS) and microfluidic devices for biosensing. Moreover, glass is radio frequency (RF) transparent, making it an excellent material for sensor and energy transmission devices. Advancements are constantly being made in this field, yet machining smooth through-glass vias (TGVs) with high aspect ratio remains challenging due to poor glass machinability. As TGVs are required for several micro-devices, intensive research is being carried out on numerous glass micromachining technologies. This paper reviews established and emerging technologies for glass micro-hole drilling, describing their principles of operation and characteristics, and their advantages and disadvantages. These technologies are sorted into four machining categories: mechanical, thermal, chemical, and hybrid machining (which combines several machining methods). Achieved features by these methods are summarized in a table and presented in two graphs. We believe that this paper will be a valuable resource for researchers working in the field of glass micromachining as it provides a comprehensive review of the different glass micromachining technologies. It will be a useful guide for advancing these techniques and establishing new hybrid ones, especially since this is the first broad review in this field. View Full-Text
Keywords: micro-drilling techniques; glass; micro-devices; micro-fluidics; MEMS micro-drilling techniques; glass; micro-devices; micro-fluidics; MEMS
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Hof, L.A.; Abou Ziki, J. Micro-Hole Drilling on Glass Substrates—A Review. Micromachines 2017, 8, 53.

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