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Journal: Micromachines, 2017
Volume: 8
Number: 41

Article: Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges
Authors: by Vasileios Mitrakos, Lisa Macintyre, Fiona C. Denison, Philip J.W. Hands and Marc P.Y. Desmulliez
Link: https://www.mdpi.com/2072-666X/8/2/41

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