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Micromachines 2017, 8(12), 354; doi:10.3390/mi8120354

Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics

1
Aeponyx Inc., Montreal, QC H3C 4J9, Canada
2
Department of Computer Science, Université du Québec à Montréal, Montreal, QC H2X 3Y7, Canada
3
Department of Electrical Engineering, École de Technologie Supérieure, Montreal, QC H3C 1K3, Canada
*
Author to whom correspondence should be addressed.
Received: 31 October 2017 / Revised: 28 November 2017 / Accepted: 30 November 2017 / Published: 1 December 2017
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Abstract

This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is actuated electrostatically using an optimized circular comb drive. An angular motion of ±9.5° using 180 V is demonstrated. To minimize the optical losses between the moving and fixed parts, a gap-closing mechanism is implemented to reduce the initial air gap to submicron values. A latch structure is implemented to hold the platform in place with a resolution of 0.25° over the entire motion range. The platform was integrated with silicon nitride waveguides to create a crossbar switch and preliminary optical measurements are reported. In the bar state, the loss was measured to be 14.8 dB with the gap closed whereas in the cross state it was 12.2 dB. To the authors’ knowledge, this is the first optical switch based on a rotating microelectromechanical device with integrated silicon nitride waveguides reported to date. View Full-Text
Keywords: microelectromechanical systems (MEMS); electrostatic actuator; latch; micro-opto-electro-mechanical systems (MOEMS); micro-platform; optical switch; scanning; integrated optics; silicon-on-insulator (SOI) MEMS; optical waveguide microelectromechanical systems (MEMS); electrostatic actuator; latch; micro-opto-electro-mechanical systems (MOEMS); micro-platform; optical switch; scanning; integrated optics; silicon-on-insulator (SOI) MEMS; optical waveguide
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Briere, J.; Elsayed, M.Y.; Saidani, M.; Bérard, M.; Beaulieu, P.-O.; Rabbani-Haghighi, H.; Nabki, F.; Ménard, M. Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics. Micromachines 2017, 8, 354.

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