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Micromachines 2017, 8(1), 29; doi:10.3390/mi8010029

Glass Imprint Templates by Spark Assisted Chemical Engraving for Microfabrication by Hot Embossing

1
Department of Mechanical and Industrial Engineering, Concordia University, Montreal, QC H4B 1R6, Canada
2
FlowJEM Inc., 80 St. George Street, Toronto, ON M5S 3H6, Canada
3
Posalux SA, 18, Fritz Oppliger, CH-2504 Biel/Bienne, Switzerland
4
Département de Chimie, Université Laval, Québec, QC G1V 0A6, Canada
*
Author to whom correspondence should be addressed.
Academic Editor: Hongrui Jiang
Received: 21 December 2016 / Revised: 10 January 2017 / Accepted: 16 January 2017 / Published: 23 January 2017
(This article belongs to the Special Issue Glass Micromachining)
View Full-Text   |   Download PDF [5149 KB, uploaded 23 January 2017]   |  

Abstract

As the field of microelectromechanical systems (MEMS) matures, new demands are being placed on the microfabrication of complex architectures in robust materials, such as hard plastics. Iterative design optimization in a timely manner—rapid prototyping—places challenges on template fabrication, for methods such as injection moulding and hot embossing. In this paper, we demonstrate the possibility of using spark assisted chemical engraving (SACE) to produce micro patterned glass templates. The direct, write-based approach enabled the facile fabrication of smooth microfeatures with variations in all three-dimensions, which could be replicated by hot embossing different thermoplastics. As a proof of principle, we demonstrated the technique for a high glass transition temperature polycarbonate. Good fidelity over more than 10 cycles provides evidence that the approach is viable for rapid prototyping and has the potential to satisfy commercial-grade production at medium-level output volumes. Glass imprint templates showed no degradation after use, but care must be taken due to brittleness. The technique has the potential to advance microfabrication needs in academia and could be used by MEMS product developers. View Full-Text
Keywords: micro-fabrication; hot embossing; micro-machining; microfluidics; glass; thermoplastics; MEMS; spark assisted chemical engraving micro-fabrication; hot embossing; micro-machining; microfluidics; glass; thermoplastics; MEMS; spark assisted chemical engraving
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Hof, L.A.; Guo, X.; Seo, M.; Wüthrich, R.; Greener, J. Glass Imprint Templates by Spark Assisted Chemical Engraving for Microfabrication by Hot Embossing. Micromachines 2017, 8, 29.

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