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Micromachines 2017, 8(1), 25; doi:10.3390/mi8010025

A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application

1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
University of Chinese Academy of Sciences, Beijing 100080, China
*
Author to whom correspondence should be addressed.
Academic Editor: Marc Desmulliez
Received: 14 December 2016 / Revised: 11 January 2017 / Accepted: 12 January 2017 / Published: 19 January 2017
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Abstract

This paper presents a sensitivity-enhanced gas sensor based on a film bulk acoustic resonator (FBAR). It was designed and fabricated with micro through-holes in its top electrode for sensitivity enhancement. The sensor was driven by a Colpitts oscillator circuit, and the output signal had characteristics of a power of −2.6 dBm@3 V and a phase noise of −90 dBc/Hz@100 kHz. In order to test the performance of the sensor, it was used for the detection of relative humidity (RH) and ethanol. When the relative humidity ranged from 25% to 88%, the frequency shift of the sensor was 733 kHz, which was 3.2 times higher than that of the existing FBAR sensor with a complete top electrode. Fitting results of the frequency shift and the relative humidity indicated that the measurement error was within ±0.8% RH. When the ethanol concentration ranged from 0 to 0.2355 g/L, the frequency shift of the sensor was 365 kHz. The effect of the oscillator circuit on the adsorption reaction and temperature response of the FBAR sensor device was analyzed to optimize its detection application. View Full-Text
Keywords: film bulk acoustic resonator (FBAR); adsorption; humidity sensor; oscillator circuit film bulk acoustic resonator (FBAR); adsorption; humidity sensor; oscillator circuit
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Zhang, M.; Du, L.; Fang, Z.; Zhao, Z. A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application. Micromachines 2017, 8, 25.

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