Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications
AbstractThis paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method, combines elementary capacitive pickup electrodes with periodic-sensing-array transducers. In order to achieve a large dynamic range with an ultrahigh resolution, the capacitive detection system employs two periodic-sensing-array transducers. Each of them can provide numbers for the signal period in the entire operating range. The suspended proof-mass is encapsulated between two glass caps, which results in a three dimensional structure. The measured resonant frequency and quality factor (Q) are 13.2 Hz and 47, respectively. The calibration response of a ±0.7 g input acceleration is presented, and the accelerometer system presents a sensitivity of 122 V/g and a noise floor of 30 ng/√Hz (at 1 Hz, and 1 atm). The bias stability for a period of 10 h is 30 μg. The device has endured a shock up to ±2.6 g, and the full scale output appears to be approximately ±1.4 g presently. This work presents a new opportunity for highly sensitive MEMS fabrication to enable future high-precision measurement applications, such as for gravity measurements. View Full-Text
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Li, Z.; Wu, W.J.; Zheng, P.P.; Liu, J.Q.; Fan, J.; Tu, L.C. Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications. Micromachines 2016, 7, 167.
Li Z, Wu WJ, Zheng PP, Liu JQ, Fan J, Tu LC. Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications. Micromachines. 2016; 7(9):167.Chicago/Turabian Style
Li, Zhu; Wu, Wen J.; Zheng, Pan P.; Liu, Jin Q.; Fan, Ji; Tu, Liang C. 2016. "Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications." Micromachines 7, no. 9: 167.
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