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Micromachines 2016, 7(5), 88; doi:10.3390/mi7050088

Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

1
Instituto de Engenharia de Sistemas de Computadores-Microsystems and Nanotechnology (INESC-MN), Rua Alves Redol, No. 9, Lisboa 1000-029, Portugal
2
Instituto Superior Técnico IST, Physics Department, Universidade de Lisboa, Lisbon 1049-001, Portugal
3
Picosense, Inc., 1900 Addison St Ste 200, Berkeley, CA 94704, USA
4
International Iberian Nanotechnology Laboratory (INL), Av. Mestre Jose Veiga, Braga 4715-330, Portugal
*
Author to whom correspondence should be addressed.
Academic Editor: Stephanus Büttgenbach
Received: 21 March 2016 / Revised: 2 May 2016 / Accepted: 4 May 2016 / Published: 11 May 2016
(This article belongs to the Special Issue Magnetic MEMS)
View Full-Text   |   Download PDF [5408 KB, uploaded 11 May 2016]   |  

Abstract

In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybrid architecture, lower detectivities are expected when compared with those obtained for individual sensors. This particularity results from the change of sensor’s operating point to frequencies above the 1/f noise knee. View Full-Text
Keywords: magnetoresistive sensors; noise; MEMS; hybrid devices; frequency modulation; magnetic field detection magnetoresistive sensors; noise; MEMS; hybrid devices; frequency modulation; magnetic field detection
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Valadeiro, J.; Cardoso, S.; Macedo, R.; Guedes, A.; Gaspar, J.; Freitas, P.P. Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields. Micromachines 2016, 7, 88.

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