Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
AbstractThis article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed. View Full-Text
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Du, H.; Chau, F.S.; Zhou, G. Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators. Micromachines 2016, 7, 69.
Du H, Chau FS, Zhou G. Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators. Micromachines. 2016; 7(4):69.Chicago/Turabian Style
Du, Han; Chau, Fook S.; Zhou, Guangya. 2016. "Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators." Micromachines 7, no. 4: 69.
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