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Micromachines 2016, 7(4), 66; doi:10.3390/mi7040066

Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation

1
Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM), ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, Spain
2
Department of Photonics and Bioengineering, ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, Spain
*
Author to whom correspondence should be addressed.
Academic Editor: Andreas Richter
Received: 21 February 2016 / Revised: 30 March 2016 / Accepted: 8 April 2016 / Published: 13 April 2016
(This article belongs to the Special Issue Polymeric Microsystems)
View Full-Text   |   Download PDF [3491 KB, uploaded 13 April 2016]   |  

Abstract

We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a two-dimensional (2D) array of micro-lenses/reservoirs conformally covered by an Al 2D nanohole array (NHA) film on a PC CD substrate. It is also shown that such a curvilinear Al NHA layer can be easily transferred onto a flexible polymeric support. The presented technique provides a new tool for creating lab-on-CD architectures and developing multifunctional (flexible) non-planar nanostructured films and surfaces. View Full-Text
Keywords: micro/nanopatterning; electron-beam lithography; polycarbonate; compact disk; micro-optics; microfluidics; lab-on-CD micro/nanopatterning; electron-beam lithography; polycarbonate; compact disk; micro-optics; microfluidics; lab-on-CD
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Barrios, C.A.; Canalejas-Tejero, V. Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation. Micromachines 2016, 7, 66.

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