Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation
AbstractWe show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a two-dimensional (2D) array of micro-lenses/reservoirs conformally covered by an Al 2D nanohole array (NHA) film on a PC CD substrate. It is also shown that such a curvilinear Al NHA layer can be easily transferred onto a flexible polymeric support. The presented technique provides a new tool for creating lab-on-CD architectures and developing multifunctional (flexible) non-planar nanostructured films and surfaces. View Full-Text
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Barrios, C.A.; Canalejas-Tejero, V. Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation. Micromachines 2016, 7, 66.
Barrios CA, Canalejas-Tejero V. Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation. Micromachines. 2016; 7(4):66.Chicago/Turabian Style
Barrios, Carlos A.; Canalejas-Tejero, Víctor. 2016. "Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation." Micromachines 7, no. 4: 66.