Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes
AbstractNonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effect caused by the electrostatic force. This effect is reflected in our mathematical model used to simulate the dynamic response of the micro-mirror. The effects of increased forcing and decreased damping on the frequency response are investigated as the mirrors are mostly used in vacuum packages. The results can predict MEMS mirror behaviors in optical devices better than previously-reported models. View Full-Text
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Ozdogan, M.; Towfighian, S. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes. Micromachines 2016, 7, 42.
Ozdogan M, Towfighian S. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes. Micromachines. 2016; 7(3):42.Chicago/Turabian Style
Ozdogan, Mehmet; Towfighian, Shahrzad. 2016. "Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes." Micromachines 7, no. 3: 42.
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