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Micromachines 2016, 7(3), 42; doi:10.3390/mi7030042

Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

1
Mechanical Engineering Department, State University of New York at Binghamton, Binghamton, NY 13902, USA
2
Mechanical Engineering Department, Turkish Military Academy, Ankara 06420, Turkey
*
Author to whom correspondence should be addressed.
Academic Editor: Hongrui Jiang
Received: 7 January 2016 / Revised: 1 March 2016 / Accepted: 10 March 2016 / Published: 18 March 2016
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Abstract

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effect caused by the electrostatic force. This effect is reflected in our mathematical model used to simulate the dynamic response of the micro-mirror. The effects of increased forcing and decreased damping on the frequency response are investigated as the mirrors are mostly used in vacuum packages. The results can predict MEMS mirror behaviors in optical devices better than previously-reported models. View Full-Text
Keywords: MEMS micro-mirror; sidewall electrodes; bi-axial mirror; softening behavior; nonlinear dynamics; secondary resonances MEMS micro-mirror; sidewall electrodes; bi-axial mirror; softening behavior; nonlinear dynamics; secondary resonances
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ozdogan, M.; Towfighian, S. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes. Micromachines 2016, 7, 42.

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