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Micromachines 2016, 7(3), 36; doi:10.3390/mi7030036

A Microfluidic-Based Fabry-Pérot Gas Sensor

1
State Key Laboratory of Precision Measurement Technology and Instruments, School of Precision Instruments and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
2
State Key Laboratory for Mesoscopic Physics, School of Physics, Peking University, Beijing 100044, China
3
Key Laboratory of Optoelectronics Information Technology, School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
4
School of Materials Science and Engineering, Tianjin University, Tianjin 300072, China
*
Author to whom correspondence should be addressed.
Academic Editors: Manabu Tokeshi and Kiichi Sato
Received: 7 December 2015 / Revised: 29 January 2016 / Accepted: 22 February 2016 / Published: 25 February 2016
(This article belongs to the Special Issue Micro/Nano Devices for Chemical Analysis)
View Full-Text   |   Download PDF [1339 KB, uploaded 2 March 2016]   |  

Abstract

We developed a micro-gas detector based on a Fabry-Pérot (FP) cavity embedded in a microfluidic channel. The detector was fabricated in two steps: a silicon substrate was bonded to a glass slide curved with a micro-groove, forming a microfluidic FP cavity; then an optical fiber was inserted through a hole drilled at the center of the groove into the microfluidic FP cavity, forming an FP cavity. The light is partially reflected at the optical fiber endface and the silicon surface, respectively, generating an interference spectrum. The detection is implemented by monitoring the interference spectrum shift caused by the refractive index change of the FP cavity when a gas analyte passes through. This detection mechanism (1) enables detecting a wide range of analytes, including both organic and inorganic (inertia) gases, significantly enhancing its versatility; (2) does not disturb any gas flow so that it can collaborate with other detectors to improve sensing performances; and (3) ensures a fast sensing response for potential applications in gas chromatography systems. In the experiments, we used various gases to demonstrate the sensing capability of the detector and observed drastically different sensor responses. The estimated sensitivity of the detector is 812.5 nm/refractive index unit (RIU) with a detection limit of 1.2 × 10−6 RIU assuming a 1 pm minimum resolvable wavelength shift. View Full-Text
Keywords: micro gas sensor; micro Fabry-Pérot cavity; optical fiber; microfluidic channel; MEMS micro gas sensor; micro Fabry-Pérot cavity; optical fiber; microfluidic channel; MEMS
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Tao, J.; Zhang, Q.; Xiao, Y.; Li, X.; Yao, P.; Pang, W.; Zhang, H.; Duan, X.; Zhang, D.; Liu, J. A Microfluidic-Based Fabry-Pérot Gas Sensor. Micromachines 2016, 7, 36.

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