In-Plane MEMS Shallow Arch Beam for Mechanical Memory
AbstractWe demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept. View Full-Text
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Hafiz, M.A.A.; Kosuru, L.; Ramini, A.; Chappanda, K.N.; Younis, M.I. In-Plane MEMS Shallow Arch Beam for Mechanical Memory. Micromachines 2016, 7, 191.
Hafiz MAA, Kosuru L, Ramini A, Chappanda KN, Younis MI. In-Plane MEMS Shallow Arch Beam for Mechanical Memory. Micromachines. 2016; 7(10):191.Chicago/Turabian Style
Hafiz, Md A.A.; Kosuru, Lakshmoji; Ramini, Abdallah; Chappanda, Karumbaiah N.; Younis, Mohammad I. 2016. "In-Plane MEMS Shallow Arch Beam for Mechanical Memory." Micromachines 7, no. 10: 191.
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