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Micromachines 2015, 6(7), 879-901; doi:10.3390/mi6070879

Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices

Faculty of Electrical Engineering, Universiti Teknologi Malaysia, 81310 Skudai, Johor, Malaysia
Flextronics, Pelabuhan Tanjung Pelepas (PTP), 81560 Gelang Patah, Johor, Malaysia
Author to whom correspondence should be addressed.
Academic Editor: Miko Elwenspoek
Received: 16 March 2015 / Revised: 9 May 2015 / Accepted: 19 May 2015 / Published: 10 July 2015
View Full-Text   |   Download PDF [4011 KB, uploaded 10 July 2015]   |  


Shape memory alloys (SMAs) are a class of smart materials characterized by shape memory effect and pseudo-elastic behavior. They have the capability to retain their original form when subjected to certain stimuli, such as heat or a magnetic field. These unique properties have attracted many researchers to seek their application in various fields including transportation, aerospace, and biomedical. The ease process adaption from semiconductor manufacturing technology provides many opportunities for designing micro-scale devices using this material. This paper gives an overview of the fabrication and manufacturing technique of thin-film and bulk micromachined SMAs. Key features such as material properties, transformation temperature, material composition, and actuation method are also presented. The application and micromechanism for both thin-film and bulk SMA are described. Finally, the microactuator devices emphasized for biomedical applications such as microgrippers and micropumps are highlighted. The presented review will provide information for researchers who are actively working on the development of SMA-based microscale biomedical devices. View Full-Text
Keywords: thin-film shape memory alloy; bulk shape memory alloy; microactuator; micropump; biomedical thin-film shape memory alloy; bulk shape memory alloy; microactuator; micropump; biomedical

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Zainal, M.A.; Sahlan, S.; Ali, M.S.M. Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices. Micromachines 2015, 6, 879-901.

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