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Micromachines 2014, 5(4), 1051-1060; doi:10.3390/mi5041051

Micromachining of AlN and Al2O3 Using Fiber Laser

Applied Laser and Phonics Group, University of Applied Sciences Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany
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Received: 12 August 2014 / Revised: 23 October 2014 / Accepted: 3 November 2014 / Published: 10 November 2014
(This article belongs to the Special Issue Laser Micro- and Nano- Processing)
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Abstract

We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%). A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%). In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser. View Full-Text
Keywords: ceramics; Al2O3; AlN; micromachining; fiber laser ceramics; Al2O3; AlN; micromachining; fiber laser
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Preusch, F.; Adelmann, B.; Hellmann, R. Micromachining of AlN and Al2O3 Using Fiber Laser. Micromachines 2014, 5, 1051-1060.

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