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2014-09-11T22:47:51+08:00
2014-09-11T17:13:11+08:00
2014-09-11T22:47:51+08:00
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Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching
Viktor Tielen, Yves Bellouard
Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to
two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges.
flexure
femtosecond laser
three-dimensional micromachining
cross-spring pivot
optomechanics
Hoecken (Hoekens) linkage
Adobe PDF Library 10.0
flexure; femtosecond laser; three-dimensional micromachining; cross-spring pivot; optomechanics; Hoecken (Hoekens) linkage
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