Journal: Micromachines, 2013
Article: Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography
Authors: Luis Guillermo Villanueva, Oscar Vazquez-Mena, Cristina Martin-Olmos, Veronica Savu, Katrin Sidler and Juergen Brugger
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