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Journal: Micromachines, 2012
Volume: 3
Page(s): 396-412
396-412
Article: Design Considerations for a Micromachined Proportional Control Valve
Groen, M.S.; Brouwer, D.M.; Wiegerink, R.J.; Lötters, J.C.

http://www.mdpi.com/2072-666X/3/2/396

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