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Micromachines 2010, 1(3), 112-128; doi:10.3390/microm1010112

Optimization Strategy for Resonant Mass Sensor Design in the Presence of Squeeze Film Damping

*  and
Department of Mechanical Engineering-Engineering Mechanics, Michigan Technological University, 1400 Townsend Drive, Houghton, MI, USA
* Author to whom correspondence should be addressed.
Received: 27 October 2010 / Revised: 17 November 2010 / Accepted: 6 December 2010 / Published: 14 December 2010
(This article belongs to the Special Issue Advances in Micromechanics and Microengineering)


This paper investigates the design optimization of an electrostatically actuated microcantilever resonator that operates in air. The nonlinear effects of electrostatic actuation and air damping make the structural dynamics modeling more complex. There is a need for an efficient way to simulate the system behavior so that the design can be more readily optimized. This paper describes an efficient analytical approach for determining the optimum design for a microcantilever resonant mass sensor. One simple case is described. The sensor design is a square plate that is coated with a functional polymer and attached to the substrate with folded leg springs. The plate has a square hole in the middle to reduce the effect of squeeze film damping. With the analytical approach, the optimum hole size for maximum sensitivity is found.
Keywords: squeeze film damping; MEMS; resonant mass sensor; optimization squeeze film damping; MEMS; resonant mass sensor; optimization
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Li, C.; Miller, M.H. Optimization Strategy for Resonant Mass Sensor Design in the Presence of Squeeze Film Damping. Micromachines 2010, 1, 112-128.

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