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Journal: Micromachines, 2010
Volume: 1
Page(s): 48-67
48-67
Article: High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
Sarajlic, E.; Yamahata, C.; Berenschot, E.; Tas, N.; Fujita, H.; Krijnen, G.

http://www.mdpi.com/2072-666X/1/2/48

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