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• Goethals, F
• Levrau, E
• De Canck, E
• Baklanov, MR.
• Detavernier, C
• Van Driessche, I
• Van Der Voort, P
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• Goethals, F
• Levrau, E
• De Canck, E
• Baklanov, MR.
• Detavernier, C
• Van Driessche, I
• Van Der Voort, P
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• Goethals, F
• Levrau, E
• De Canck, E
• Baklanov, MR.
• Detavernier, C
• Van Driessche, I
• Van Der Voort, P

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Materials 2013, 6(2), 570-579; doi:10.3390/ma6020570

Article

Pore Narrowing of Mesoporous Silica Materials

Frederik Goethals ¹ , Elisabeth Levrau ² , Els De Canck ¹ , Mikhail R. Baklanov ³ , Christophe Detavernier ² , Isabel Van Driessche ¹  and Pascal Van Der Voort ^1,*

¹ Inorganic and Physical Chemistry, Ghent University, Krijgslaan 281 (S3), Gent 9000, Belgium ² Solid State Sciences, Ghent University, Krijgslaan 281 (S1), Gent 9000, Belgium ³ Imec (Interuniversity Microelectronics Centre), Kapeldreef 175, Heverlee 3001, Belgium

* Author to whom correspondence should be addressed.

Received: 22 January 2013; in revised form: 7 February 2013 / Accepted: 16 February 2013 / Published: 20 February 2013

(This article belongs to the Special Issue Advances in Mesoporous Materials)

Download PDF Full-Text [329 KB, uploaded 20 February 2013 11:06 CET]

Abstract: To use mesoporous silicas as low-k materials, the pore entrances must be really small to avoid diffusion of metals that can increase the dielectric constant of the low-k dielectric. In this paper we present a new method to narrow the pores of mesoporous materials through grafting of a cyclic-bridged organosilane precursor. As mesoporous material, the well-studied MCM-41 powder was selected to allow an easy characterization of the grafting reactions. Firstly, the successful grafting of the cyclic-bridged organosilane precursor on MCM-41 is presented. Secondly, it is demonstrated that pore narrowing can be obtained without losing porosity by removing the porogen template after grafting. The remaining silanols in the pores can then be end-capped with hexamethyl disilazane (HMDS) to make the material completely hydrophobic. Finally, we applied the pore narrowing method on organosilica films to prove that this method is also successful on existing low-k materials.

Keywords: pore sealing; MCM-41; bridged organosilanes

Supplementary Files

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  NMR Study of the Substituted Cyclic Organosilane Precursor

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