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Optimization of the Adhesion Strength of Arc Ion Plating TiAlN Films by the Taguchi Method
School of Nano & Advanced Materials Engineering, Changwon National University, Changwon, 641-773, Korea
* Author to whom correspondence should be addressed.
Received: 7 June 2009 / Accepted: 17 June 2009 / Published: 17 June 2009
Abstract: A three-level six-factor (arc power, substrate temperature, pre-treatment bias voltage, working pressure, deposition bias voltage and pretreatment time) orthogonal experimental array (L18) to optimize the adhesion strength of arc ion plating (AIP) TiAlN films was designed using the Taguchi method. An optimized film process, namely substrate temperature 220 °C, arc power 60 A, negative bias voltage -800 V, nitrogen pressure 10-2 Torr, pretreated voltage -450 V and pretreated time 15 minutes was obtained by the Taguchi program for the purpose of obtaining a larger critical load. The critical load of the optimized TiAlN film (53 N) was increased by 43% compared to the film with the highest critical load before optimization. The improvement in the adhesion strength of the films was attributed to the enhancement of hardness and the competitive growth of the (111), (200) and (220) orientations in the film.
Keywords: arc ion plating; TiAlN; adhesion strength; Taguchi method
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MDPI and ACS Style
Joo, Y.-K.; Zhang, S.-H.; Yoon, J.-H.; Cho, T.-Y. Optimization of the Adhesion Strength of Arc Ion Plating TiAlN Films by the Taguchi Method. Materials 2009, 2, 699-709.
Joo Y-K, Zhang S-H, Yoon J-H, Cho T-Y. Optimization of the Adhesion Strength of Arc Ion Plating TiAlN Films by the Taguchi Method. Materials. 2009; 2(2):699-709.
Joo, Yun-Kon; Zhang, Shi-Hong; Yoon, Jae-Hong; Cho, Tong-Yul. 2009. "Optimization of the Adhesion Strength of Arc Ion Plating TiAlN Films by the Taguchi Method." Materials 2, no. 2: 699-709.