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Materials 2018, 11(5), 785; https://doi.org/10.3390/ma11050785

CMOS-Compatible Silicon Nanowire Field-Effect Transistor Biosensor: Technology Development toward Commercialization

1
Future Industries Institute and ARC Centre of Excellence for Convergent Nano-Bio Science and Technology, University of South Australia, Mawson Lakes 5095, South Australia, Australia
2
Department of Electrical, Electronic and Computer Engineering, Technical University of Munich, 85748 Munich, Germany
3
Peter Grünberg Institute, Forschungszentrum JülichGmbH, 52425 Jülich, Germany
*
Author to whom correspondence should be addressed.
Received: 15 April 2018 / Revised: 8 May 2018 / Accepted: 10 May 2018 / Published: 11 May 2018
(This article belongs to the Special Issue Materials: 10th Anniversary)
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Abstract

Owing to their two-dimensional confinements, silicon nanowires display remarkable optical, magnetic, and electronic properties. Of special interest has been the development of advanced biosensing approaches based on the field effect associated with silicon nanowires (SiNWs). Recent advancements in top-down fabrication technologies have paved the way to large scale production of high density and quality arrays of SiNW field effect transistor (FETs), a critical step towards their integration in real-life biosensing applications. A key requirement toward the fulfilment of SiNW FETs’ promises in the bioanalytical field is their efficient integration within functional devices. Aiming to provide a comprehensive roadmap for the development of SiNW FET based sensing platforms, we critically review and discuss the key design and fabrication aspects relevant to their development and integration within complementary metal-oxide-semiconductor (CMOS) technology. View Full-Text
Keywords: silicon nanowire; field effect transistor; micro/nanofabrication; CMOS; biosensor; diagnostic; commercialization silicon nanowire; field effect transistor; micro/nanofabrication; CMOS; biosensor; diagnostic; commercialization
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Tran, D.P.; Pham, T.T.T.; Wolfrum, B.; Offenhäusser, A.; Thierry, B. CMOS-Compatible Silicon Nanowire Field-Effect Transistor Biosensor: Technology Development toward Commercialization. Materials 2018, 11, 785.

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