The Influence of the Composition of Ru100−xAlx (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability
IFW Dresden, SAWLab Saxony, P.O. Box 270116, 01171 Dresden, Germany
Author to whom correspondence should be addressed.
Academic Editor: Thomas Fiedler
Received: 6 December 2016 / Revised: 6 February 2017 / Accepted: 1 March 2017 / Published: 10 March 2017
RuAl thin films possess a high potential as a high temperature stable metallization for surface acoustic wave devices. During the annealing process of the Ru-Al films, Al
is formed at the surface of the films even under high vacuum conditions, so that the composition of a deposited Ru
film is shifted to a Ru-rich alloy. To compensate for this effect, the Al content is systematically increased during the deposition of the Ru-Al films. Three Al-rich alloys—Ru
—were analyzed concerning their behavior after high temperature treatment under high vacuum and air conditions in comparison to the initial Ru
sample. Although the films’ cross sections show a more homogeneous structure in the case of the Al-rich films, the RuAl phase formation is reduced with increasing Al content.
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Seifert, M.; Rane, G.K.; Oswald, S.; Menzel, S.B.; Gemming, T. The Influence of the Composition of Ru100−xAlx (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability. Materials 2017, 10, 277.
Seifert M, Rane GK, Oswald S, Menzel SB, Gemming T. The Influence of the Composition of Ru100−xAlx (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability. Materials. 2017; 10(3):277.
Seifert, Marietta; Rane, Gayatri K.; Oswald, Steffen; Menzel, Siegfried B.; Gemming, Thomas. 2017. "The Influence of the Composition of Ru100−xAlx (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability." Materials 10, no. 3: 277.
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