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Materials 2017, 10(3), 226; doi:10.3390/ma10030226

Development of the α-IGZO/Ag/α-IGZO Triple-Layer Structure Films for the Application of Transparent Electrode

1
Department of Electrical Engineering, Kun-Shan University, Tainan 710, Taiwan
2
Department of Chemical and Materials Engineering, National University of Kaohsiung, Kaohsiung 811, Taiwan
3
Department of Electronic Engineering, Kao Yuan University, Kaohsiung 82151, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editor: Te-Hua Fang
Received: 6 January 2017 / Revised: 10 February 2017 / Accepted: 20 February 2017 / Published: 24 February 2017
(This article belongs to the Special Issue Selected Material Related Papers from ICI2016)
View Full-Text   |   Download PDF [4322 KB, uploaded 24 February 2017]   |  

Abstract

We investigated the structural, optical, and electrical properties of amorphous IGZO/silver/amorphous IGZO (α-IGZO/Ag/α-IGZO) triple-layer structures that were deposited at room temperature on Eagle XG glass and flexible polyethylene terephthalate substrates through the sputtering method. Thin Ag layers with different thicknesses were inserted between two IGZO layers to form a triple-layer structure. Ag was used because of its lower absorption and resistivity. Field emission scanning electron microscopy measurements of the triple-layer structures revealed that the thicknesses of the Ag layers ranged from 13 to 41 nm. The thickness of the Ag layer had a large effect on the electrical and optical properties of the electrodes. The optimum thickness of the Ag metal thin film could be evaluated according to the optical transmittance, electrical conductivity, and figure of merit of the electrode. This study demonstrates that the α-IGZO/Ag/α-IGZO triple-layer transparent electrode can be fabricated with low sheet resistance (4.2 Ω/□) and high optical transmittance (88.1%) at room temperature without postannealing processing on the deposited thin films. View Full-Text
Keywords: amorphous IGZO; Ag; triple-layer structures; transmittance; electrical conductivity amorphous IGZO; Ag; triple-layer structures; transmittance; electrical conductivity
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Chen, K.-N.; Yang, C.-F.; Wu, C.-C.; Chen, Y.-H. Development of the α-IGZO/Ag/α-IGZO Triple-Layer Structure Films for the Application of Transparent Electrode. Materials 2017, 10, 226.

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