Effect of Intrinsic Stress on Structural and Optical Properties of Amorphous Si-Doped SnO2 Thin-Film
AbstractThe effect of intrinsic stress on the structure and physical properties of silicon-tin-oxide (STO) films have been investigated. Since a state of tensile stress is available in as-deposited films, the value of stress can be exponentially enhanced when the annealing temperature is increased. The tensile stress is able to not only suppress the crystallization and widen the optical band gap of STO films, but also reduce defects of STO films. In this report, the good electrical performance of STO thin-film transistors (TFTs) can be obtained when annealing temperature is 450 °C. This includes a value of saturation mobility that can be reached at 6.7 cm2/Vs, a ratio of Ion/Ioff as 7.34 × 107, a steep sub-threshold swing at 0.625 V/decade, and a low trap density of 7.96 × 1011 eV−1·cm−2, respectively. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Ning, H.; Liu, X.; Zhang, H.; Fang, Z.; Cai, W.; Chen, J.; Yao, R.; Xu, M.; Wang, L.; Lan, L.; Peng, J.; Wang, X.; Zhang, Z. Effect of Intrinsic Stress on Structural and Optical Properties of Amorphous Si-Doped SnO2 Thin-Film. Materials 2017, 10, 24.
Ning H, Liu X, Zhang H, Fang Z, Cai W, Chen J, Yao R, Xu M, Wang L, Lan L, Peng J, Wang X, Zhang Z. Effect of Intrinsic Stress on Structural and Optical Properties of Amorphous Si-Doped SnO2 Thin-Film. Materials. 2017; 10(1):24.Chicago/Turabian Style
Ning, Honglong; Liu, Xianzhe; Zhang, Hongke; Fang, Zhiqiang; Cai, Wei; Chen, Jianqiu; Yao, Rihui; Xu, Miao; Wang, Lei; Lan, Linfeng; Peng, Junbiao; Wang, Xiaofeng; Zhang, Zichen. 2017. "Effect of Intrinsic Stress on Structural and Optical Properties of Amorphous Si-Doped SnO2 Thin-Film." Materials 10, no. 1: 24.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.