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Journal: Sensors, 2009
Volume: 9
Page(s): 2389-2414
2389-2414
Article: Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs
Shakoor, R.I.; Bazaz, S.A.; Kraft, M.; Lai, Y.; Ul Hassan, M.M.

http://www.mdpi.com/1424-8220/9/4/2389

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