Surface Acoustic WaveAmmonia Sensors Based on ST-cut Quartz under Periodic Al Structure

doi:10.3390/s90200980

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Sensors 2009, 9(2), 980-994; doi:10.3390/s90200980

Article

Surface Acoustic WaveAmmonia Sensors Based on ST-cut Quartz under Periodic Al Structure

Cheng-Liang Hsu, Chi-Yen Shen* , Rume-Tze Tsai and Ming-Yau Su

Department of Electrical Engineering, I- Shou University, Kaohsiung County, 84001, Taiwan

* Author to whom correspondence should be addressed.

Received: 16 January 2009 / Accepted: 13 February 2009 / Published: 16 February 2009

(This article belongs to the Section Physical Sensors)

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Abstract: Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-port resonator with an Al grating on ST-cut quartz. The measured frequency responses of the resonator were similar to the simulation ones. Then, the chemical interface of polyaniline/WO₃ composites was coated on the SAW sensor for ammonia detection. The SAW sensor responded to ammonia gas and could be regenerated using dry nitrogen.

Keywords: Rayleigh SAW; space harmonic method; ammonia; polyaniline/WO3

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MDPI and ACS Style

Hsu, C.-L.; Shen, C.-Y.; Tsai, R.-T.; Su, M.-Y. Surface Acoustic WaveAmmonia Sensors Based on ST-cut Quartz under Periodic Al Structure. Sensors 2009, 9, 980-994.

AMA Style

Hsu C.-L., Shen C.-Y., Tsai R.-T., Su M.-Y. Surface Acoustic WaveAmmonia Sensors Based on ST-cut Quartz under Periodic Al Structure. Sensors. 2009; 9(2):980-994.

Chicago/Turabian Style

Hsu, Cheng-Liang; Shen, Chi-Yen; Tsai, Rume-Tze; Su, Ming-Yau. 2009. "Surface Acoustic WaveAmmonia Sensors Based on ST-cut Quartz under Periodic Al Structure." Sensors 9, no. 2: 980-994.

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