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Journal: Sensors, 2009
Volume: 9
Page(s): 1141-1166
1141-1166
Article: Piezoresistive Sensitivity, Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures
Shi, C.; Liu, X.; Chuai, R.

http://www.mdpi.com/1424-8220/9/2/1141

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