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Sensors 2007, 7(11), 2539-2547; doi:10.3390/s71102539

SU-8 Guiding Layer for Love Wave Devices

School of Science and Technology, Nottingham Trent University, Clifton Campus, Nottingham. NG11 8NS. UK
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Received: 1 October 2007 / Accepted: 31 October 2007 / Published: 1 November 2007
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Abstract

SU-8 is a technologically important photoresist used extensively for thefabrication of microfluidics and MEMS, allowing high aspect ratio structures to beproduced. In this work we report the use of SU-8 as a Love wave sensor guiding layerwhich allows the possibility of integrating a guiding layer with flow cell during fabrication.Devices were fabricated on ST-cut quartz substrates with a single-single finger design suchthat a surface skimming bulk wave (SSBW) at 97.4 MHz was excited. SU-8 polymer layerswere successively built up by spin coating and spectra recorded at each stage; showing afrequency decrease with increasing guiding layer thickness. The insertion loss andfrequency dependence as a function of guiding layer thickness was investigated over thefirst Love wave mode. Mass loading sensitivity of the resultant Love wave devices wasinvestigated by deposition of multiple gold layers. Liquid sensing using these devices wasalso demonstrated; water-glycerol mixtures were used to demonstrate sensing of density-viscosity and the physical adsorption and removal of protein was also assessed usingalbumin and fibrinogen as model proteins. View Full-Text
Keywords: Love wave; SU-8; SU-8 guiding layer; SH-SAW Love wave; SU-8; SU-8 guiding layer; SH-SAW
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Roach, P.; Atherton, S.; Doy, N.; McHale, G.; Newton, M.I. SU-8 Guiding Layer for Love Wave Devices. Sensors 2007, 7, 2539-2547.

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