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Wet Chemical Synthesis and Screening of Thick Porous Oxide Films for Resistive Gas Sensing Applications
Universität des Saarlandes, Im Stadtwald, Geb. 4.2, 66125 Saarbruecken; Germany
RWTH Aachen, Landoltweg 1, 52074 Aachen, Germany
* Author to whom correspondence should be addressed.
Received: 26 September 2006; Accepted: 14 November 2006 / Published: 15 November 2006
(This article belongs to the Special Issue Gas Sensors
Abstract: A method of wet chemical synthesis suitable for high throughput and combinatorial applications has been developed for the synthesis of porous resistive thick-film gas sensors. This method is based on the robot-controlled application of unstable metal oxide suspensions on an array of 64 inter-digital electrodes positioned on an Al2O3 substrate. SnO2, WO3, ZrO2, TiO2, CeO2, In2O3 and Bi2O3 were chosen as base oxides, and were optimised by doping or mixed oxide formation. The parallel synthesis of mixed oxide sensors is illustrated by representative examples. The electrical characteristics and the sensor performance of the films were measured by high-throughput impedance spectroscopy while supplying various test gases (H2, CO, NO, NO2, propene). Data collection, data mining techniques applied and the best potential sensor materials discovered are presented.
Keywords: Combinatorial Chemistry; High Throughput; Thick Film; Sol-Gel; Sensor; Materials Science.
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MDPI and ACS Style
Frenzer, G.; Frantzen, A.; Sanders, D.; Simon, U.; Maier, W.F. Wet Chemical Synthesis and Screening of Thick Porous Oxide Films for Resistive Gas Sensing Applications. Sensors 2006, 6, 1568-1586.
Frenzer G, Frantzen A, Sanders D, Simon U, Maier WF. Wet Chemical Synthesis and Screening of Thick Porous Oxide Films for Resistive Gas Sensing Applications. Sensors. 2006; 6(11):1568-1586.
Frenzer, Gerald; Frantzen, Andreas; Sanders, Daniel; Simon, Ulrich; Maier, Wilhelm F. 2006. "Wet Chemical Synthesis and Screening of Thick Porous Oxide Films for Resistive Gas Sensing Applications." Sensors 6, no. 11: 1568-1586.