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Sensors 2005, 5(3), 126-138; doi:10.3390/s5030126
Article

“Playing around” with Field-Effect Sensors on the Basis of EIS Structures, LAPS and ISFETs

1
1 University of Applied Sciences Aachen (Division Jülich), Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, 52428 Jülich, Germany 2 Institute of Thin Films and Interfaces, Research Centre Jülich, 52425 Jülich, Germany
Received: 1 June 2004 / Accepted: 21 January 2005 / Published: 31 March 2005
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Abstract

Microfabricated semiconductor devices are becoming increasingly relevant, alsofor the detection of biological and chemical quantities. Especially, the “marriage” ofbiomolecules and silicon technology often yields successful new sensor concepts. Thefabrication techniques of such silicon-based chemical sensors and biosensors, respectively,will have a distinct impact in different fields of application such as medicine, foodtechnology, environment, chemistry and biotechnology as well as information processing.Moreover, scientists and engineers are interested in the analytical benefits of miniaturisedand microfabricated sensor devices. This paper gives a survey on different types ofsemiconductor-based field-effect structures that have been recently developed in ourlaboratory.
Keywords: field-effect sensor; ISFET; EIS; LAPS. field-effect sensor; ISFET; EIS; LAPS.
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Schöning, M.J. “Playing around” with Field-Effect Sensors on the Basis of EIS Structures, LAPS and ISFETs. Sensors 2005, 5, 126-138.

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